WE POWER YOUR SUCCESS - energy technology made by imm
New FLYER gives you information about the business activities of the department Energy Technology and Catalysis.
IMM at Sensor & Test and ACHEMASIA
You can meet our scientists at Sensor & Test in Nuremberg (Hall 12, Booth 566) and ACHEMASIA in Beijing (Booth D6).
Thin Film Technology
Application specific MEMS sensors and system components
Beyond the development of prototypes for feasibility studies and concept evaluation IMM fabricates small series for product use. By joining R&D and fabrication competences under one umbrella IMM offers its partners from the fields of, e.g. process technology, analytics, medicine, aerospace and research access to customised MST solutions which exceed commercially available standards.
For that purpose IMM has a broad expertise in designing MEMS components and a high-performance clean room process line at its disposal, including appropriate metrology for the quality control. MST specific special processes comprise among others:
UV lithography with thick layer resin
Wet and dry chemical deep structuring of silicon
Optimisation of layer stress by PECVD and LPCVD processes