Thin Film Technology
Application specific MEMS sensors and system components
Beyond the development of prototypes for feasibility studies and concept evaluation IMM fabricates small series for product use. By joining R&D and fabrication competences under one umbrella IMM offers its partners from the fields of, e.g. process technology, analytics, medicine, aerospace and research access to customised MST solutions which exceed commercially available standards.
- IMM´s cleanroom
For that purpose IMM has a broad expertise in designing MEMS components and a high-performance clean room process line at its disposal, including appropriate metrology for the quality control. MST specific special processes comprise among others:
- UV lithography with thick layer resin
- Wet and dry chemical deep structuring of silicon
- Optimisation of layer stress by PECVD and LPCVD processes
- Multi target and reactive gas sputtering
- Micro electroplating and electroforming
- Packaging
Current R&D or fabrication activities on customer request or in the framework of research co-operations comprise for instance:
- Pressure and shear force transducers/sensors
- Flow rate sensors for liquids and gases
- Hydrogen and Helium-selective membranes for gas detection
- Cantilever tips, partially as multi arrays, for scanning probe processes and force spectroscopy
- Micro electrode structures for various applications in the fields of chemical, biological and medical analytics
Contact: Dr. Peter Detemple, Head of Microstructuring and Sensors Department,
Phone: +49 6131/990 318
