Gas-selective membranes
For the separation of low molecular weight gases like Helium (He) or Hydrogen (H2), very often membrane processes are used. The Quartz and Palladium thin film membranes developed at IMM employ a silicon grid as support structure so that a high pressure resistance at a high permeability for Helium or Hydrogen can be provided respectively. Currently the membranes are applied in gas sensing applications but could also be used e.g. in the field of miniaturized reformer units and fuel cells. The geometry and membrane parameters could easily be adapted to other customer specific requirements.
- Helium-selective quartz membrane
Quartz membranes
Permeability for He: 1.0 * 10-6 mbar ls-1
Pressure stability: >1 bar
Platinum heating meander
Chip size; 23 × 50 mm2
Active membrane area: 150 mm2
Support structure: Si carrier with 4895 holes
Applied technologies: oxidation, lithography (double-sided), sputtering, lift-off
Developed for Inficon GmbH,Cologne, and now manufactured at IMM for use in the new Inficon Protec P 3000 leakage detector
- Hydrogen-selective palladium membrane
Palladium membranes
Permeability for H2: 1.0 * 10-0 mbar ls-1 at 300°C
Pressure stability: >3 bar
Alloying with Silver or Cupper possible
Additional application of a heating meander possible
Chip size; 23 × 50 mm2
Active membrane area: 175 mm2
Support structure: Si carrier with 4895 holes
Developed in cooperation with Inficon GmbH,Cologne, and the Technical University of Kaiserslautern, Germany
