Special Sensor Solutions
Assigned by customers from industry and research as well, IMM realises application specific silicon sensors and other particular MEMS components as single copies and in continuous limited-lot production. Typical examples are
- pressure and shear force sensors
- continuous flow sensors for gases and liquids
- hydrogen and helium-selective membranes
- cantilever tips and arrays for scanning probe microscopy and force spectroscopy
- interdigital and other microelectrode structures in different designs for chemical, biological and medical analytics
The realisation of these components is commonly made possible by IMM's expertise in the fields of silicon deep etching, the deposition of low stress functional layers, noble metal lift-off, and SOI full
wafer processing. The provided production services often result from process or prototype development performed in bilateral cooperation or multilateral networks.
After a phase of evaluation and improvement, these developments are ready for application. As development and production are held on the same production line, time and cost intense technology transfer is commonly saved. The resulting reduction of costs and time to market is a major benefit for our applicants.
Contact: Dr. Peter Detemple, Head of Microstructuring and Sensors Department,
Phone: +49 6131/990 318
