Optical and tactile measuring

IMM has a wide variety of devices at its disposal: for the optical and tactile measuring of

• layer heights,
• the determination of roughness according to DIN,
• the characterisation of different structure dimensions resulting from micro structuring,
• element analysis of raw materials and impurities,
• the surveillance of fabrication
• tolerances as well as
• numerous inspection tools based on microscopy.

It is possible to check metal and non-metal materials as well as samples, such as insulators, polymers and organic samples with varying characteristics. Thereby the detection of characteristics is possible from the centimetre range down to the two digit nanometre scale.

At IMM the following methods of micro structure measuring technologies are available for quality assurance:

• Scanning Electron Microscopy
• Scanning Force Microscopy
• Energy dispersive X-ray analysis
• Profilometer (optical, tactile)
• White light interferometer
• Coordinate measurement
• Spectrometry
• Hardness measurement
• Light microscopy
• Layer thickness measurement

Micro structure measuring technology at IMM is predominantly used for the non-destructive inspection in clean room processes. However, this technology is as well used for a general and comprehensive quality control throughout all departments. In addition, the equipment is available for external customer services.